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Kazuaki Kozasa
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Nagasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method and etching apparatus of semiconductor wafer
Patent number
9,305,850
Issue date
Apr 5, 2016
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning semiconductor wafer and semiconductor wafer
Patent number
8,992,791
Issue date
Mar 31, 2015
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of epitaxial silicon wafer and substrate clean...
Patent number
8,696,809
Issue date
Apr 15, 2014
Sumco Techxiv Corporation
Kazuaki Kozasa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Slurry supplying apparatus and method of polishing semiconductor wa...
Patent number
8,303,373
Issue date
Nov 6, 2012
Sumco Techxiv Corporation
Kazuaki Kozasa
B24 - GRINDING POLISHING
Information
Patent Grant
Etching method and etching apparatus of semiconductor wafer
Patent number
8,273,260
Issue date
Sep 25, 2012
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rough polishing method of semiconductor wafer and polishing apparat...
Patent number
7,666,063
Issue date
Feb 23, 2010
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rough polishing method of semiconductor wafer and polishing apparat...
Patent number
7,540,800
Issue date
Jun 2, 2009
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing method for semiconductor wafer
Patent number
7,303,691
Issue date
Dec 4, 2007
Sumco Techxiv Corporation
Kazuaki Kozasa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER
Publication number
20120305187
Publication date
Dec 6, 2012
SUMCO TECHXIV CORPORATION
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING SEMICONDUCTOR WAFER AND SEMICONDUCTOR WAFER
Publication number
20100093177
Publication date
Apr 15, 2010
SUMCO TECHXIV CORPORATION
Kazuaki KOZASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY SUPPLYING APPARATUS AND METHOD OF POLISHING SEMICONDUCTOR WA...
Publication number
20090298393
Publication date
Dec 3, 2009
Sumco Techxiv Corporation
Kazuaki Kozasa
B24 - GRINDING POLISHING
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER
Publication number
20090286333
Publication date
Nov 19, 2009
Sumco Techxiv Corporation
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF RECYCLING ABRASIVE SLURRY
Publication number
20090053981
Publication date
Feb 26, 2009
SUMCO TECHXIV CORPORATION
Kazuaki Kozasa
B24 - GRINDING POLISHING
Information
Patent Application
ROUGH POLISHING METHOD OF SEMICONDUCTOR WAFER AND POLISHING APPARAT...
Publication number
20090042482
Publication date
Feb 12, 2009
SUMCO TECHXIV CORPORATION
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF EPITAXIAL SILICON WAFER AND SUBSTRATE CLEAN...
Publication number
20080308129
Publication date
Dec 18, 2008
EPAS
Kazuaki KOZASA
C30 - CRYSTAL GROWTH
Information
Patent Application
Rough polishing method of semiconductor wafer and polishing apparat...
Publication number
20080081541
Publication date
Apr 3, 2008
SUMCO TECHXIV CORPORATION
Kazuaki Kozasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing method for semiconductor wafer
Publication number
20070059935
Publication date
Mar 15, 2007
KOMATSU ELECTRONIC METALS CO., LTD.
Kazuaki Kozasa
B24 - GRINDING POLISHING