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Kazuaki KOZASA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Silicon wafer single-side polishing method
Patent number
11,628,534
Issue date
Apr 18, 2023
Sumco Corporation
Toshiharu Nakajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing head, wafer polishing apparatus using the same, and wafer...
Patent number
11,554,458
Issue date
Jan 17, 2023
Sumco Corporation
Yuki Nakano
B24 - GRINDING POLISHING
Information
Patent Grant
Method of producing bonded wafer and bonded wafer
Patent number
11,211,285
Issue date
Dec 28, 2021
Sumco Corporation
Youzou Satou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor wafer
Patent number
9,991,110
Issue date
Jun 5, 2018
Sumco Corporation
Kazuaki Kozasa
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing silicon wafer
Patent number
9,956,663
Issue date
May 1, 2018
Sumco Corporation
Kazuaki Kozasa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
WAFER POLISHING METHOD AND SILICON WAFER
Publication number
20220415666
Publication date
Dec 29, 2022
SUMCO CORPORATION
Kazuaki KOZASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING HEAD, WAFER POLISHING APPARATUS USING THE SAME, AND WAFER...
Publication number
20210331285
Publication date
Oct 28, 2021
SUMCO CORPORATION
Yuki NAKANO
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF PRODUCING BONDED WAFER AND BONDED WAFER
Publication number
20200343130
Publication date
Oct 29, 2020
SUMCO CORPORATION
Youzou SATOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER SINGLE-SIDE POLISHING METHOD
Publication number
20190030676
Publication date
Jan 31, 2019
SUMCO CORPORATION
Toshiharu NAKAJIMA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING SILICON WAFER
Publication number
20170252891
Publication date
Sep 7, 2017
SUMCO CORPORATION
Kazuaki KOZASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
Publication number
20170011903
Publication date
Jan 12, 2017
SUMCO CORPORATION
Kazuaki KOZASA
H01 - BASIC ELECTRIC ELEMENTS