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Polishing apparatus
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Patent number 10,137,552
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Issue date Nov 27, 2018
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Ebara Corporation
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Kazuaki Maeda
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 9,649,739
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Issue date May 16, 2017
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Ebara Corporation
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Kazuaki Maeda
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 9,138,854
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Issue date Sep 22, 2015
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Ebara Corporation
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Kazuaki Maeda
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B24 - GRINDING POLISHING
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Spin processing apparatus
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Patent number 6,269,548
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Issue date Aug 7, 2001
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Ebara Corporation
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Hiroyuki Shinozaki
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...