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Vacuum pump
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Patent number 5,190,438
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Issue date Mar 2, 1993
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Hitachi, Ltd.
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Minoru Taniyama
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbo molecular pump
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Patent number 4,735,550
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Issue date Apr 5, 1988
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Hitachi, Ltd.
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Takeshi Okawada
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbomolecular pump
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Patent number 4,732,530
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Issue date Mar 22, 1988
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Hitachi, Ltd.
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Shinjiroo Ueda
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...