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Kazuaki NISHIMURA
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method and etching device
Patent number
11,282,714
Issue date
Mar 22, 2022
Central Glass Company, Limited
Akifumi Yao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,734,242
Issue date
Aug 4, 2020
Tokyo Electron Limited
Kazuaki Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,312,079
Issue date
Jun 4, 2019
Tokyo Electron Limited
Koji Takeya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming system
Patent number
10,199,268
Issue date
Feb 5, 2019
Tokyo Electron Limited
Susumu Yamauchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Modification processing method and method of manufacturing semicond...
Patent number
9,911,596
Issue date
Mar 6, 2018
Tokyo Electron Limited
Tamotsu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modification processing method and method of manufacturing semicond...
Patent number
9,443,724
Issue date
Sep 13, 2016
Tokyo Electron Limited
Tamotsu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
7,432,468
Issue date
Oct 7, 2008
Tokyo Electron Limited
Shinsuke Oka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Thin film forming apparatus cleaning method
Patent number
6,925,731
Issue date
Aug 9, 2005
Tokyo Electron Limited
Kazuaki Nishimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND ETCHING DEVICE
Publication number
20210287915
Publication date
Sep 16, 2021
Central Glass Company, Limited
Akifumi YAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MONITORING LIGHT EMISSION, SUBSTRATE PROCESSING METHOD, A...
Publication number
20200176338
Publication date
Jun 4, 2020
TOKYO ELECTRON LIMITED
Kazuaki NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180197748
Publication date
Jul 12, 2018
TOKYO ELECTRON LIMITED
Kazuaki NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
Publication number
20180076087
Publication date
Mar 15, 2018
Susumu YAMAUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD
Publication number
20170309478
Publication date
Oct 26, 2017
TOKYO ELECTRON LIMITED
Koji TAKEYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODIFICATION PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20160351390
Publication date
Dec 1, 2016
TOKYO ELECTRON LIMITED
Tamotsu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODIFICATION PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20150357187
Publication date
Dec 10, 2015
TOKYO ELECTRON LIMITED
Tamotsu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING...
Publication number
20120247511
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Mitsuhiro OKADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20070235425
Publication date
Oct 11, 2007
TOKYO ELECTRON LIMITED
Shinsuke Oka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thin film forming apparatus cleaning method
Publication number
20050090123
Publication date
Apr 28, 2005
Kazuaki Nishimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat treatment apparatus and cleaning method of the same
Publication number
20040163677
Publication date
Aug 26, 2004
Yutaka Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing and cleaning method
Publication number
20030034053
Publication date
Feb 20, 2003
Kazuaki Nishimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etching method, processing apparatus and etching apparatus
Publication number
20020011465
Publication date
Jan 31, 2002
Hiroyuki Yamamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat treatment apparatus and cleaning method of the same
Publication number
20010055738
Publication date
Dec 27, 2001
Yutaka Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...