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Kazuaki Souda
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Kashima-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor wafer treatment method and apparatus therefor
Patent number
7,731,801
Issue date
Jun 8, 2010
Sumco Corporation
Makoto Takemura
B08 - CLEANING
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Patent Grant
Technique on ozone water for use in cleaning semiconductor substrate
Patent number
7,678,200
Issue date
Mar 16, 2010
Sumitomo Mitsubishi Silicon Corporation
Makoto Takemura
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
Technique on ozone water for use in cleaning semiconductor substrate
Publication number
20060154837
Publication date
Jul 13, 2006
Echo Giken Co., Ltd.
Makoto Takemura
B08 - CLEANING
Information
Patent Application
Semiconductor wafer treatment method and apparatus therefor
Publication number
20060042654
Publication date
Mar 2, 2006
SUMCO CORPORATION
Makoto Takemura
B08 - CLEANING