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Miyagi, JP
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last 30 patents
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Patent Application
GAS SUPPLY SYSTEM, GAS CONTROL SYSTEM, PLASMA PROCESSING APPARATUS,...
Publication number
20240212987
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE
Publication number
20230034399
Publication date
Feb 2, 2023
TOKYO ELECTRON LIMITED
Risako MATSUDA
H01 - BASIC ELECTRIC ELEMENTS