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Kazuaki Yamauchi
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Chiba-ken, JP
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last 30 patents
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Patent Application
Plasma film-forming apparatus and cleaning method for the same
Publication number
20040007247
Publication date
Jan 15, 2004
ULVAC, Inc.
Shin Asari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma film-forming apparatus and cleaning method for the same
Publication number
20020124866
Publication date
Sep 12, 2002
ULVAC, Inc.
Shin Asari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...