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Kazue Takata
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Multilayer film reflector for soft X-rays and manufacturing method...
Patent number
7,342,715
Issue date
Mar 11, 2008
Canon Kabushiki Kaisha
Kyoko Imai
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
Multilayer film reflector for soft X-rays and manufacturing method...
Publication number
20050213199
Publication date
Sep 29, 2005
Canon Kabushiki Kaisha
Kyoko Imai
G02 - OPTICS