Kazufumi Igari

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Machida, JP

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Patents Grantslast 30 patents

Information Patent Grant
Transferring device for semiconductor wafers
- Patent number 5,052,884
- Issue date Oct 1, 1991
- Tokyo Aircraft Instrument Co., Ltd.
- Kazufumi Igari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor waxer detection system
- Patent number 5,003,188
- Issue date Mar 26, 1991
- Tokyo Aircraft Instrument Co., Ltd.
- Kazufumi Igari
- H01 - BASIC ELECTRIC ELEMENTS