Kazuharu Minato

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Yokohama-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
OBSERVATION DEVICE, INSPECTION DEVICE, METHOD FOR MANUFACTURING SEM...
- Publication number 20130330848
- Publication date Dec 12, 2013
- Kazuharu Minato
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection device
- Publication number 20110254946
- Publication date Oct 20, 2011
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING