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Kazuhei YOSHINAGA
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Yokohama-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor manufacturing apparatus and method for cleaning same
Patent number
9,566,620
Issue date
Feb 14, 2017
Kabushiki Kaisha Toshiba
Kenichiro Toratani
B08 - CLEANING
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Patent Grant
Method for manufacturing semiconductor device and the semiconductor...
Patent number
8,187,973
Issue date
May 29, 2012
Kabushiki Kaisha Toshiba
Katsuyuki Sekine
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING SAME
Publication number
20130319473
Publication date
Dec 5, 2013
Kabushiki Kaisha Toshiba
Kenichiro Toratani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING SAME
Publication number
20100078045
Publication date
Apr 1, 2010
Kenichiro TORATANI
B08 - CLEANING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR...
Publication number
20090256188
Publication date
Oct 15, 2009
Katsuyuki SEKINE
H01 - BASIC ELECTRIC ELEMENTS