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Toyama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,996,337
Issue date
May 28, 2024
Kokusai Electric Corporation
Kazuyoshi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, device management controller, and r...
Patent number
11,966,210
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus, method of monitoring abnormality of...
Patent number
11,782,425
Issue date
Oct 10, 2023
Kokusai Electric Corporation
Kazuyoshi Yamamoto
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,387,152
Issue date
Jul 12, 2022
Kokusai Electric Corporation
Kazuyoshi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, device management controller, and r...
Patent number
11,237,538
Issue date
Feb 1, 2022
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus and recording medium
Patent number
11,236,743
Issue date
Feb 1, 2022
Kokusai Electric Corporation
Masanori Okuno
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing in a process chamber for semiconductor manufac...
Patent number
11,086,304
Issue date
Aug 10, 2021
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus and device management controller
Patent number
10,937,676
Issue date
Mar 2, 2021
Kokusai Electric Corporation
Kazuhide Asai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing apparatus
Patent number
10,903,098
Issue date
Jan 26, 2021
Kokusai Electric Corporation
Akihiko Yoneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and non-transitory computer-readable...
Patent number
10,860,005
Issue date
Dec 8, 2020
Kokusai Electric Corporation
Kazuhide Asai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system, substrate processing apparatus and man...
Patent number
10,496,078
Issue date
Dec 3, 2019
Kokusai Electric Corporation
Kazuyoshi Yamamoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Management apparatus, substrate processing system and non-transitor...
Patent number
10,289,781
Issue date
May 14, 2019
Kokusai Electric Corporation
Toshiro Koshimaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
10,211,110
Issue date
Feb 19, 2019
Hitachi Kokusai Electric Inc.
Tsukasa Kamakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus, method, and computer-readable medium for managing abnorm...
Patent number
9,581,996
Issue date
Feb 28, 2017
HITACHI KOKUSAI ELECRIC INC.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Group management apparatus, substrate processing system and method...
Patent number
9,400,794
Issue date
Jul 26, 2016
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Statistical analysis method and substrate process system
Patent number
9,142,436
Issue date
Sep 22, 2015
Hitachi Kokusai Electric Inc.
Kazuhide Asai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate processing apparatus and dis...
Patent number
8,948,899
Issue date
Feb 3, 2015
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Information managing method, information searching method and data...
Patent number
8,719,230
Issue date
May 6, 2014
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system
Patent number
8,639,367
Issue date
Jan 28, 2014
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system, group managing apparatus, and method o...
Patent number
8,538,571
Issue date
Sep 17, 2013
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system and group management system
Patent number
8,447,424
Issue date
May 21, 2013
Hitachi Kokusai Electric Inc.
Kazuhide Asai
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Information managing method, information managing apparatus and sub...
Patent number
8,329,479
Issue date
Dec 11, 2012
Hitachi Kokusai Electrical Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system and group management system
Patent number
7,813,828
Issue date
Oct 12, 2010
Hitachi Kokusai Electric Inc.
Kazuhide Asai
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD...
Publication number
20240014055
Publication date
Jan 11, 2024
Kokusai Electric Corporation
Kazuyoshi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230397303
Publication date
Dec 7, 2023
Kokusai Electric Corporation
Hiroyuki YAMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230099451
Publication date
Mar 30, 2023
Kokusai Electric Corporation
Norihito SHINOZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230027653
Publication date
Jan 26, 2023
Kokusai Electric Corporation
Kazuyoshi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANAGEMENT APPARATUS, METHOD OF PROCESSING DATA, RECORDING MEDIUM,...
Publication number
20220300192
Publication date
Sep 22, 2022
Kokusai Electric Corporation
Yusuke SAKAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
Publication number
20220136497
Publication date
May 5, 2022
Kokusai Electric Corporation
Masanori OKUNO
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20220019191
Publication date
Jan 20, 2022
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210235546
Publication date
Jul 29, 2021
Kokusai Electric Corporation
Hiroyuki YAMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...
Publication number
20210191371
Publication date
Jun 24, 2021
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MONITORING ABNORMALITY OF...
Publication number
20200201305
Publication date
Jun 25, 2020
Kokusai Electric Corporation
Kazuyoshi YAMAMOTO
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20200192324
Publication date
Jun 18, 2020
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200043763
Publication date
Feb 6, 2020
Kokusai Electric Corporation
Akihiko YONEDA
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
Publication number
20190195219
Publication date
Jun 27, 2019
Kokusai Electric Corporation
Masanori OKUNO
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND DEVICE MANAGEMENT CONTROLLER
Publication number
20190035657
Publication date
Jan 31, 2019
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND MAN...
Publication number
20180210423
Publication date
Jul 26, 2018
Hitachi Kokusai Electric Inc.
Kazuyoshi YAMAMOTO
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
Publication number
20180120822
Publication date
May 3, 2018
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS MANAGEMENT CONTROLLER
Publication number
20170300044
Publication date
Oct 19, 2017
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20170285613
Publication date
Oct 5, 2017
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
MANAGEMENT APPARATUS, SUBSTRATE PROCESSING SYSTEM AND NON-TRANSITOR...
Publication number
20160078163
Publication date
Mar 17, 2016
Hitachi Kokusai Electric Inc.
Toshiro KOSHIMAKI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Group Management Apparatus, Substrate Processing System and Method...
Publication number
20140025677
Publication date
Jan 23, 2014
Kazuhide ASAI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INFORMATION MANAGING METHOD, INFORMATION SEARCHING METHOD AND DATA...
Publication number
20130066857
Publication date
Mar 14, 2013
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
MANAGEMENT DEVICE
Publication number
20120253724
Publication date
Oct 4, 2012
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, MANAGEMENT APPARATUS, DATA ANALYSIS ME...
Publication number
20120226475
Publication date
Sep 6, 2012
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND DIS...
Publication number
20120065763
Publication date
Mar 15, 2012
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
STATISTICAL ANALYSIS METHOD AND SUBSTRATE PROCESS SYSTEM
Publication number
20120010743
Publication date
Jan 12, 2012
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, GROUP MANAGING APPARATUS, AND METHOD O...
Publication number
20110079177
Publication date
Apr 7, 2011
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20110071661
Publication date
Mar 24, 2011
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
Substrate processing system and group management system
Publication number
20100324718
Publication date
Dec 23, 2010
Hitachi Kokusai Electric Inc.
Kazuhide Asai
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
INFORMATION MANAGING METHOD, INFORMATION MANAGING APPARATUS AND SUB...
Publication number
20090265322
Publication date
Oct 22, 2009
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
Substrate processing system and group management system
Publication number
20080243296
Publication date
Oct 2, 2008
Hitachi Kokusai Electric Inc.
Kazuhide Asai
H04 - ELECTRIC COMMUNICATION TECHNIQUE