Kazuhide HASEBE

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,881,379
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,272
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,271
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,879,066
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing crystal in recess and processing apparatus used t...
- Patent number 10,822,714
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Yoichiro Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,191,378
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,176,992
- Issue date Jan 8, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,141,187
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,970,110
- Issue date May 15, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of forming silicon nitride film
- Patent number 9,920,422
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride film forming method using nitrading active species
- Patent number 9,865,457
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon film forming method, thin film forming method and cross-sec...
- Patent number 9,758,865
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch-type vertical substrate processing apparatus and substrate ho...
- Patent number 9,613,838
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming silicon-containing thin film
- Patent number 9,353,442
- Issue date May 31, 2016
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stacked semiconductor device, and method and apparatus of manufactu...
- Patent number 9,343,292
- Issue date May 17, 2016
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of forming silicon nitride film
- Patent number 9,263,250
- Issue date Feb 16, 2016
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating semiconductor device and the semiconductor d...
- Patent number 9,230,799
- Issue date Jan 5, 2016
- Tohoku University
- Akinobu Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film formation method
- Patent number 9,190,271
- Issue date Nov 17, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon film formation method and amorphous silicon film...
- Patent number 9,123,782
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 9,005,459
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon film formation method and amorphous silicon film...
- Patent number 9,006,021
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 8,945,339
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming seed layer and method of forming silicon-containi...
- Patent number 8,946,065
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 8,940,097
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Kazuhide Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of forming a germanium thin film
- Patent number 8,815,714
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon nitride film
- Patent number 8,753,984
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film formation method and film formation apparatus
- Patent number 8,728,957
- Issue date May 20, 2014
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trench-filling method and film-forming system
- Patent number 8,722,510
- Issue date May 13, 2014
- Tokyo Electron Limited
- Masahisa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and method for using same
- Patent number 8,697,578
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiCN film formation method and apparatus
- Patent number 8,591,989
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20240096595
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20220328301
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS
- Publication number 20220010424
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING PROCESSING APPARATUS, FILM-FORMING METHOD, AND STORAGE...
- Publication number 20200157683
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190115204
- Publication date Apr 18, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190096658
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190041756
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20180019113
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING CRYSTAL IN RECESS AND PROCESSING APPARATUS USED T...
- Publication number 20170253989
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Yoichiro CHIBA
- C30 - CRYSTAL GROWTH
Information Patent Application
PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20170167019
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20170162381
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NITRIDE FILM FORMING METHOD
- Publication number 20170125238
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING PROCESSING APPARATUS, FILM-FORMING METHOD, AND STORAGE...
- Publication number 20170009345
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160148801
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM
- Publication number 20160108519
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Processing Apparatus
- Publication number 20150275360
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM...
- Publication number 20150206795
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150194441
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND ACTIVE SPECIES GENERATING METHOD
- Publication number 20150167171
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Apparatus
- Publication number 20150107517
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR FORMING SILICON-CONTAINING THIN FILM
- Publication number 20150101532
- Publication date Apr 16, 2015
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus of Forming Silicon Nitride Film
- Publication number 20150099374
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...
- Publication number 20150037970
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...
- Publication number 20140367699
- Publication date Dec 18, 2014
- TOHOKU UNIVERSITY
- Akinobu TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A GERMANIUM THIN FILM
- Publication number 20140331928
- Publication date Nov 13, 2014
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH-TYPE VERTICAL SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HO...
- Publication number 20140283750
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS OF MANUFACTU...
- Publication number 20140284808
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20140206180
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM CRACK DETECTING APPARATUS AND FILM FORMING APPARATUS
- Publication number 20140020626
- Publication date Jan 23, 2014
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- G01 - MEASURING TESTING

Kazuhide HASEBE

Person

Patents Grantslast 30 patents

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Mask pattern forming method, fine pattern forming method, and film...

Method of growing crystal in recess and processing apparatus used t...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Plasma processing apparatus

Method and apparatus of forming silicon nitride film

Nitride film forming method using nitrading active species

Silicon film forming method, thin film forming method and cross-sec...

Batch-type vertical substrate processing apparatus and substrate ho...

Apparatus for forming silicon-containing thin film

Stacked semiconductor device, and method and apparatus of manufactu...

Method and apparatus of forming silicon nitride film

Method for fabricating semiconductor device and the semiconductor d...

Thin film formation method

Amorphous silicon film formation method and amorphous silicon film...

Film deposition method and film deposition apparatus

Amorphous silicon film formation method and amorphous silicon film...

Film formation apparatus

Method of forming seed layer and method of forming silicon-containi...

Vertical heat treatment apparatus

Method of forming a germanium thin film

Method and apparatus for forming silicon nitride film

Thin film formation method and film formation apparatus

Trench-filling method and film-forming system

Film formation apparatus and method for using same

SiCN film formation method and apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS

FILM-FORMING PROCESSING APPARATUS, FILM-FORMING METHOD, AND STORAGE...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

METHOD OF GROWING CRYSTAL IN RECESS AND PROCESSING APPARATUS USED T...

PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

NITRIDE FILM FORMING METHOD

FILM-FORMING PROCESSING APPARATUS, FILM-FORMING METHOD, AND STORAGE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

METHOD AND APPARATUS OF FORMING SILICON NITRIDE FILM

Vacuum Processing Apparatus

AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

PROCESSING APPARATUS AND ACTIVE SPECIES GENERATING METHOD

Plasma Processing Apparatus

APPARATUS FOR FORMING SILICON-CONTAINING THIN FILM

Method and Apparatus of Forming Silicon Nitride Film

Silicon Film Forming Method, Thin Film Forming Method and Cross-Sec...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...

METHOD OF FORMING A GERMANIUM THIN FILM

BATCH-TYPE VERTICAL SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HO...

STACKED SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS OF MANUFACTU...

THIN FILM FORMATION METHOD

FILM CRACK DETECTING APPARATUS AND FILM FORMING APPARATUS