Kazuhiko Fukazawa

Person

Misato-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and inspection method
- Patent number 10,359,367
- Issue date Jul 23, 2019
- Nikon Corporation
- Kazuhiko Fukazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Evaluation method and device, processing method, and exposure system
- Patent number 10,274,835
- Issue date Apr 30, 2019
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method, inspection apparatus, exposure control method, e...
- Patent number 9,964,497
- Issue date May 8, 2018
- Nikon Corporation
- Kazuhiko Fukazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
- Patent number 9,322,788
- Issue date Apr 26, 2016
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
- Patent number 9,240,356
- Issue date Jan 19, 2016
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus, method for inspecting surface, exposu...
- Patent number 9,196,550
- Issue date Nov 24, 2015
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method, inspection apparatus, exposure control method, e...
- Patent number 8,945,954
- Issue date Feb 3, 2015
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Evaluation device and evaluation method
- Patent number 8,705,034
- Issue date Apr 22, 2014
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 8,687,182
- Issue date Apr 1, 2014
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus, defect inspection method and method of...
- Patent number 8,446,578
- Issue date May 21, 2013
- Nikon Corporation
- Mari Sugihara
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 8,441,627
- Issue date May 14, 2013
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Evaluation device and evaluation method
- Patent number 8,334,977
- Issue date Dec 18, 2012
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting apparatus and surface inspecting method
- Patent number 8,223,328
- Issue date Jul 17, 2012
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface state detecting apparatus
- Patent number 7,990,535
- Issue date Aug 2, 2011
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 7,834,993
- Issue date Nov 16, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus
- Patent number 7,697,139
- Issue date Apr 13, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting apparatus
- Patent number 7,692,780
- Issue date Apr 6, 2010
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus, defect inspection method and method of...
- Patent number 7,643,137
- Issue date Jan 5, 2010
- Nikon Corporation
- Mari Sugihara
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,557,912
- Issue date Jul 7, 2009
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection apparatus and surface defect inspection m...
- Patent number 7,372,557
- Issue date May 13, 2008
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus, surface inspection method and exposur...
- Patent number 7,369,224
- Issue date May 6, 2008
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection system, substrate inspection method, and subst...
- Patent number 7,330,042
- Issue date Feb 12, 2008
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 7,298,471
- Issue date Nov 20, 2007
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus using radiation or light
- Patent number 6,693,293
- Issue date Feb 17, 2004
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus
- Patent number 6,654,113
- Issue date Nov 25, 2003
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection apparatus and surface inspection method
- Patent number 6,646,735
- Issue date Nov 11, 2003
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 5,780,853
- Issue date Jul 14, 1998
- Nikon Corporation
- Futoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 5,646,403
- Issue date Jul 8, 1997
- Nikon Corporation
- Futoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...
- Publication number 20160041108
- Publication date Feb 11, 2016
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE SYSTEM, EXPOSURE...
- Publication number 20150356726
- Publication date Dec 10, 2015
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EVALUATION METHOD AND DEVICE, PROCESSING METHOD, AND EXPOSURE SYSTEM
- Publication number 20150338745
- Publication date Nov 26, 2015
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD, INSPECTION APPARATUS, EXPOSURE CONTROL METHOD, E...
- Publication number 20150049314
- Publication date Feb 19, 2015
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE METHOD, AND METHO...
- Publication number 20130217154
- Publication date Aug 22, 2013
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20130114081
- Publication date May 9, 2013
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
- Publication number 20130100448
- Publication date Apr 25, 2013
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
EVALUATION DEVICE AND EVALUATION METHOD
- Publication number 20130070244
- Publication date Mar 21, 2013
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...
- Publication number 20120164763
- Publication date Jun 28, 2012
- Kazuhiko FUKAZAWA
- G02 - OPTICS
Information Patent Application
INSPECTION METHOD, INSPECTION APPARATUS, EXPOSURE CONTROL METHOD, E...
- Publication number 20120156810
- Publication date Jun 21, 2012
- Kazuhiko FUKAZAWA
- G02 - OPTICS
Information Patent Application
SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD
- Publication number 20120069335
- Publication date Mar 22, 2012
- NIKON CORPORATION
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection device
- Publication number 20110254946
- Publication date Oct 20, 2011
- Nikon Corporation
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
Evaluation device and evaluation method
- Publication number 20110235038
- Publication date Sep 29, 2011
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD
- Publication number 20100321677
- Publication date Dec 23, 2010
- NIKON CORPORATION
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20100225906
- Publication date Sep 9, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Surface state detecting apparatus
- Publication number 20100182593
- Publication date Jul 22, 2010
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus, defect inspection method and method of...
- Publication number 20100103419
- Publication date Apr 29, 2010
- Nikon Corporation
- Mari Sugihara
- G01 - MEASURING TESTING
Information Patent Application
OBSERVATION DEVICE, INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20090315988
- Publication date Dec 24, 2009
- Kazuhiko FUKAZAWA
- G01 - MEASURING TESTING
Information Patent Application
Surface inspecting apparatus
- Publication number 20090103080
- Publication date Apr 23, 2009
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus
- Publication number 20090059231
- Publication date Mar 5, 2009
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus and defect inspection method
- Publication number 20080316475
- Publication date Dec 25, 2008
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Surface-Inspecting Apparatus and Surface-Inspecting Method
- Publication number 20080246966
- Publication date Oct 9, 2008
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20080094628
- Publication date Apr 24, 2008
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Surface defect inspection apparatus and surface defect inspection m...
- Publication number 20070046931
- Publication date Mar 1, 2007
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus and defect inspection method
- Publication number 20060238754
- Publication date Oct 26, 2006
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus, defect inspection method and method of...
- Publication number 20060232769
- Publication date Oct 19, 2006
- Nikon Corporation
- Mari Sugihara
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus and surface inspection method
- Publication number 20060192953
- Publication date Aug 31, 2006
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Surface inspection apparatus, surface inspection method and exposur...
- Publication number 20060098189
- Publication date May 11, 2006
- Nikon Corporation
- Takeo Oomori
- G01 - MEASURING TESTING
Information Patent Application
Substrate inspection system, substrate inspection method, and subst...
- Publication number 20050072945
- Publication date Apr 7, 2005
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus, defect inspection method and method of...
- Publication number 20040239918
- Publication date Dec 2, 2004
- Nikon Corporation
- Mari Sugihara
- G01 - MEASURING TESTING

Kazuhiko Fukazawa

Person

Patents Grantslast 30 patents

Inspection apparatus and inspection method

Evaluation method and device, processing method, and exposure system

Inspection method, inspection apparatus, exposure control method, e...

Surface inspection apparatus, method for inspecting surface, exposu...

Surface inspection apparatus, method for inspecting surface, exposu...

Surface inspection apparatus, method for inspecting surface, exposu...

Inspection method, inspection apparatus, exposure control method, e...

Evaluation device and evaluation method

Surface inspection apparatus and surface inspection method

Defect inspection apparatus, defect inspection method and method of...

Surface inspection apparatus and surface inspection method

Evaluation device and evaluation method

Surface inspecting apparatus and surface inspecting method

Surface state detecting apparatus

Surface inspection apparatus and surface inspection method

Surface inspection apparatus

Surface inspecting apparatus

Defect inspection apparatus, defect inspection method and method of...

Defect inspection apparatus and defect inspection method

Surface defect inspection apparatus and surface defect inspection m...

Surface inspection apparatus, surface inspection method and exposur...

Substrate inspection system, substrate inspection method, and subst...

Surface inspection apparatus and surface inspection method

Surface inspection apparatus using radiation or light

Surface inspection apparatus

Surface inspection apparatus and surface inspection method

Scanning electron microscope

Scanning electron microscope

Patents Applicationslast 30 patents

SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...

INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE SYSTEM, EXPOSURE...

EVALUATION METHOD AND DEVICE, PROCESSING METHOD, AND EXPOSURE SYSTEM

INSPECTION METHOD, INSPECTION APPARATUS, EXPOSURE CONTROL METHOD, E...

INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE METHOD, AND METHO...

INSPECTION APPARATUS AND INSPECTION METHOD

SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD

EVALUATION DEVICE AND EVALUATION METHOD

SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSU...

INSPECTION METHOD, INSPECTION APPARATUS, EXPOSURE CONTROL METHOD, E...

SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD

Surface inspection device

Evaluation device and evaluation method

SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD

Surface inspection apparatus and surface inspection method

Surface state detecting apparatus

Defect inspection apparatus, defect inspection method and method of...

OBSERVATION DEVICE, INSPECTION DEVICE AND INSPECTION METHOD

Surface inspecting apparatus

Surface inspection apparatus

Defect inspection apparatus and defect inspection method

Surface-Inspecting Apparatus and Surface-Inspecting Method

Surface inspection apparatus and surface inspection method

Surface defect inspection apparatus and surface defect inspection m...

Defect inspection apparatus and defect inspection method

Defect inspection apparatus, defect inspection method and method of...

Surface inspection apparatus and surface inspection method

Surface inspection apparatus, surface inspection method and exposur...

Substrate inspection system, substrate inspection method, and subst...

Defect inspection apparatus, defect inspection method and method of...