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Kazuhiko Gommori
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Naka-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for treating surface of substrate plate
Patent number
6,821,906
Issue date
Nov 23, 2004
Hitachi High-Tech Electronics Engineering Co., Ltd.
Kenya Wada
B08 - CLEANING
Information
Patent Grant
Apparatus and method for processing a substrate
Patent number
6,631,726
Issue date
Oct 14, 2003
Hitachi Electronics Engineering Co., Ltd.
Kazuto Kinoshita
G11 - INFORMATION STORAGE
Information
Patent Grant
Method and apparatus for drying substrate plates
Patent number
6,421,932
Issue date
Jul 23, 2002
Hitachi Electronics Engineering Co., Ltd.
Kazuhiko Gommori
F26 - DRYING
Information
Patent Grant
Drying apparatus for a substrate and drying method thereof
Patent number
6,418,640
Issue date
Jul 16, 2002
Hitachi Electronics Engineering Co., Ltd.
Hiroshi Fukuda
F26 - DRYING
Information
Patent Grant
Disk washing apparatus
Patent number
5,092,011
Issue date
Mar 3, 1992
Hitachi Electronics Engineering Co., Ltd.
Kazuhiko Gommori
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for processing a substrate
Publication number
20040045575
Publication date
Mar 11, 2004
Hitachi Electronics Engineering Co., Ltd.
Kazuto Kinoshita
B08 - CLEANING
Information
Patent Application
Method and apparatus for treating surface of substrate plate
Publication number
20020192391
Publication date
Dec 19, 2002
Hitachi Electronics Engineering Co., Ltd.
Kenya Wada
B08 - CLEANING
Information
Patent Application
Method and apparatus for drying substrate plates
Publication number
20010015021
Publication date
Aug 23, 2001
Hitachi Electronics Engineering Co., Ltd.
Kazuhiko Gommori
F26 - DRYING