Kazuhiko Hirata

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Sagamihara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning device for surface plate correcting dresser
- Patent number 6,126,530
- Issue date Oct 3, 2000
- Speedfam Co., Ltd.
- Kazuhiko Hirata
- B08 - CLEANING
Information Patent Grant
Flat lapping machine
- Patent number 4,805,348
- Issue date Feb 21, 1989
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING