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Kazuhiko Hori
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Exposure method and exposure apparatus and mask
Patent number
6,506,544
Issue date
Jan 14, 2003
Nikon Corporation
Kazuhiko Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface height detecting apparatus and exposure apparatus using the...
Patent number
6,479,832
Issue date
Nov 12, 2002
Nikon Corporation
Tsuyoshi Naraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method and exposure apparatus
Patent number
6,366,341
Issue date
Apr 2, 2002
Nikon Corporation
Akinori Shirato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method using reference marks on both the mask and the subs...
Patent number
5,793,472
Issue date
Aug 11, 1998
Nikon Corporation
Kazuhiko Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY