Kazuhiko Horioka

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
LPP EUV light source and method for producing the same
- Patent number 9,000,402
- Issue date Apr 7, 2015
- IHI Corporation
- Hajime Kuwabara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma light source and plasma light generation method
- Patent number 8,907,567
- Issue date Dec 9, 2014
- IHI Corporation
- Hajime Kuwabara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LLP EUV LIGHT SOURCE AND METHOD FOR PRODUCING THE SAME
- Publication number 20120145930
- Publication date Jun 14, 2012
- TOKYO INSTITUTE OF TECHNOLOGY
- Hajime Kuwabara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA LIGHT SOURCE AND PLASMA LIGHT GENERATION METHOD
- Publication number 20110248635
- Publication date Oct 13, 2011
- TOKYO INSTITUTE OF TECHNOLOGY
- Hajime Kuwabara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND A METHOD FOR GENERATING...
- Publication number 20090127479
- Publication date May 21, 2009
- Ushio Denki Kabushiki Kaisha
- Tomonao HOSOKAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE FOR GENERATING EXTREME ULTRAVIOLET LIGHT FROM PLASMA
- Publication number 20090091273
- Publication date Apr 9, 2009
- Tokyo Institute of Technology
- Kazuhiko Horioka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION AND AN EXTREME...
- Publication number 20090084992
- Publication date Apr 2, 2009
- Ushio Denki Kabushiki Kaisha
- Tomonao HOSOKAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND EXTREME ULTRAVIOLET RAD...
- Publication number 20080237501
- Publication date Oct 2, 2008
- Ushio Denki Kabushiki Kaisha
- Tomonao Hosokai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Kazuhiko Horioka

Person

Patents Grantslast 30 patents

LPP EUV light source and method for producing the same

Plasma light source and plasma light generation method

Patents Applicationslast 30 patents

LLP EUV LIGHT SOURCE AND METHOD FOR PRODUCING THE SAME

PLASMA LIGHT SOURCE AND PLASMA LIGHT GENERATION METHOD

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND A METHOD FOR GENERATING...

LIGHT SOURCE FOR GENERATING EXTREME ULTRAVIOLET LIGHT FROM PLASMA

METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION AND AN EXTREME...

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND EXTREME ULTRAVIOLET RAD...