Kazuhiko INOUE

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Conduction inspection method for multipole aberration corrector, an...
- Patent number 11,915,902
- Issue date Feb 27, 2024
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector
- Patent number 11,791,125
- Issue date Oct 17, 2023
- NuFlare Technology, Inc.
- Yuichi Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam image acquisition apparatus and multi-beam image acquisi...
- Patent number 11,694,868
- Issue date Jul 4, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
- Patent number 11,605,523
- Issue date Mar 14, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
- Patent number 11,574,793
- Issue date Feb 7, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam irradiation apparatus and multi-charged...
- Patent number 11,417,495
- Issue date Aug 16, 2022
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beams irradiation apparatus
- Patent number 11,145,485
- Issue date Oct 12, 2021
- NUFLARE TECHNOLOGY, INC.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beams irradiation apparatus
- Patent number 11,139,138
- Issue date Oct 5, 2021
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam inspection apparatus with through-hole with...
- Patent number 10,950,410
- Issue date Mar 16, 2021
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam image acquisition apparatus, and alignment m...
- Patent number 10,896,801
- Issue date Jan 19, 2021
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple electron beam irradiation apparatus, multiple electron bea...
- Patent number 10,886,102
- Issue date Jan 5, 2021
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line width error obtaining method, line width error obtaining appar...
- Patent number 9,646,374
- Issue date May 9, 2017
- NuFlare Technology, Inc.
- Hideaki Hashimoto
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEA...
- Publication number 20250132119
- Publication date Apr 24, 2025
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...
- Publication number 20240079200
- Publication date Mar 7, 2024
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM
- Publication number 20230335368
- Publication date Oct 19, 2023
- NuFlare Technology, Inc.
- Munehiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEA...
- Publication number 20230102715
- Publication date Mar 30, 2023
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM INSPECTION APPARATUS AND ADJUSTMENT METHOD FOR...
- Publication number 20230080062
- Publication date Mar 16, 2023
- NuFlare Technology, Inc.
- Koichi ISHII
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...
- Publication number 20230077403
- Publication date Mar 16, 2023
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUCTION INSPECTION METHOD FOR MULTIPOLE ABERRATION CORRECTOR, AN...
- Publication number 20220277922
- Publication date Sep 1, 2022
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...
- Publication number 20220230837
- Publication date Jul 21, 2022
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR
- Publication number 20220189728
- Publication date Jun 16, 2022
- NuFlare Technology, Inc.
- Yuichi MAEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND MULTI-CHARGED...
- Publication number 20210319974
- Publication date Oct 14, 2021
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS
- Publication number 20200395189
- Publication date Dec 17, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS
- Publication number 20200286704
- Publication date Sep 10, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS
- Publication number 20200211812
- Publication date Jul 2, 2020
- NUFLARE TECHNOLOGY, INC.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM INSPECTION APPARATUS
- Publication number 20200176216
- Publication date Jun 4, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND ELECTRON BEAM IMAGE A...
- Publication number 20200168430
- Publication date May 28, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...
- Publication number 20200104980
- Publication date Apr 2, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- G02 - OPTICS
Information Patent Application
MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...
- Publication number 20200013585
- Publication date Jan 9, 2020
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND ALIGNMENT M...
- Publication number 20190362928
- Publication date Nov 28, 2019
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING PATTERN WIDTH DEVIATION, AND PATTERN INSPECTIO...
- Publication number 20170069111
- Publication date Mar 9, 2017
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LINE WIDTH ERROR OBTAINING METHOD, LINE WIDTH ERROR OBTAINING APPAR...
- Publication number 20160247267
- Publication date Aug 25, 2016
- NuFlare Technology, Inc.
- Hideaki HASHIMOTO
- G06 - COMPUTING CALCULATING COUNTING

Kazuhiko INOUE

Person

Patents Grantslast 30 patents

Conduction inspection method for multipole aberration corrector, an...

Aberration corrector

Multi-beam image acquisition apparatus and multi-beam image acquisi...

Aberration corrector and multiple electron beam irradiation apparatus

Aberration corrector and multiple electron beam irradiation apparatus

Multi-charged particle beam irradiation apparatus and multi-charged...

Multiple electron beams irradiation apparatus

Multiple electron beams irradiation apparatus

Multiple electron beam inspection apparatus with through-hole with...

Multiple electron beam image acquisition apparatus, and alignment m...

Multiple electron beam irradiation apparatus, multiple electron bea...

Line width error obtaining method, line width error obtaining appar...

Patents Applicationslast 30 patents

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEA...

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...

ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEA...

MULTI-ELECTRON BEAM INSPECTION APPARATUS AND ADJUSTMENT METHOD FOR...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...

CONDUCTION INSPECTION METHOD FOR MULTIPOLE ABERRATION CORRECTOR, AN...

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...

ABERRATION CORRECTOR

MULTI-CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND MULTI-CHARGED...

ABERRATION CORRECTOR AND MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS

MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS

MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS

MULTIPLE ELECTRON BEAM INSPECTION APPARATUS

ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND ELECTRON BEAM IMAGE A...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...

MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND ALIGNMENT M...

METHOD FOR MEASURING PATTERN WIDTH DEVIATION, AND PATTERN INSPECTIO...

LINE WIDTH ERROR OBTAINING METHOD, LINE WIDTH ERROR OBTAINING APPAR...