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Kazuhiko Ito
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and method for adjusting a substrate...
Patent number
6,973,370
Issue date
Dec 6, 2005
Tokyo Electron Limited
Kazuhiko Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus and method of aligning substrate car...
Patent number
6,915,183
Issue date
Jul 5, 2005
Tokyo Electron Limited
Naruaki Iida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,746,197
Issue date
Jun 8, 2004
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,655,891
Issue date
Dec 2, 2003
Tokyo Electron Limited
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,439,822
Issue date
Aug 27, 2002
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,425,722
Issue date
Jul 30, 2002
Tokyo Electron Limited
Issei Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
6,319,322
Issue date
Nov 20, 2001
Tokyo Electron Limited
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,074,154
Issue date
Jun 13, 2000
Tokyo Electron Limited
Issei Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
VAPORIZING APPARATUS, SUBSTRATE PROCESSING APPARATUS, COATING AND D...
Publication number
20120034369
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Kazuhiko ITO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and method for adjusting a substrate...
Publication number
20050016818
Publication date
Jan 27, 2005
TOKYO ELECTRON LIMITED
Kazuhiko Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and method of aligning substrate car...
Publication number
20040253091
Publication date
Dec 16, 2004
Naruaki Iida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20020182040
Publication date
Dec 5, 2002
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treatment system, substrate transfer system, and substrat...
Publication number
20020106268
Publication date
Aug 8, 2002
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS