Kazuhiko KIMURA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment solution supply apparatus
- Patent number 10,518,199
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Takashi Sasa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Treatment solution supply method, non-transitory computer-readable...
- Patent number 10,121,685
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Hideo Shite
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS
- Publication number 20180065065
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Takashi SASA
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20160288032
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Hideo SHITE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL