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Kazuhiko Kobayashi
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Tosu-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Vapor drying method, apparatus and recording medium for use in the...
Patent number
7,637,029
Issue date
Dec 29, 2009
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer drying apparatus and fire-extinguishing method therefor
Patent number
5,431,179
Issue date
Jul 11, 1995
Tokyo Electron Limited
Takanori Miyazaki
F26 - DRYING
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last 30 patents
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Patent Application
Vapor drying method, apparatus and recording medium for use in the...
Publication number
20070006483
Publication date
Jan 11, 2007
TOKYO ELECTRON LIMITED
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS