KAZUHIKO MISHIMA

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint lithography apparatus and device manufacturing method therefor
- Patent number 9,718,234
- Issue date Aug 1, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,645,514
- Issue date May 9, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography apparatus, determination method, and method of manufact...
- Patent number 9,606,456
- Issue date Mar 28, 2017
- Canon Kabushiki Kaisha
- Masahiro Ogura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, imprint apparatus, and method of manufacturing...
- Patent number 9,595,447
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Hiroshi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus and method of manufactur...
- Patent number 9,594,315
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,400,434
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 9,283,720
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography apparatus, alignment method, and method of manufacturin...
- Patent number 9,261,802
- Issue date Feb 16, 2016
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,188,855
- Issue date Nov 17, 2015
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detector, imprint apparatus, and article manufacturing method
- Patent number 8,922,786
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 8,842,294
- Issue date Sep 23, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Grant
Detection apparatus, exposure apparatus, and device fabrication method
- Patent number 8,659,743
- Issue date Feb 25, 2014
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,986,396
- Issue date Jul 26, 2011
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor
- Patent number 7,551,281
- Issue date Jun 23, 2009
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor
- Patent number 7,450,249
- Issue date Nov 11, 2008
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor
- Patent number 7,298,500
- Issue date Nov 20, 2007
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus, and exposure method and ap...
- Patent number 7,230,706
- Issue date Jun 12, 2007
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detector, position detecting method, and exposure apparatu...
- Patent number 7,142,284
- Issue date Nov 28, 2006
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus, and exposure method and ap...
- Patent number 7,019,836
- Issue date Mar 28, 2006
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus and method, exposure apparatus, and de...
- Patent number 6,930,016
- Issue date Aug 16, 2005
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detection apparatus, alignment apparatus and methods there...
- Patent number 6,870,623
- Issue date Mar 22, 2005
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus and exposure apparatus using the same
- Patent number 6,707,533
- Issue date Mar 16, 2004
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan type projection exposure apparatus and device manufacturing me...
- Patent number 6,335,784
- Issue date Jan 1, 2002
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting system and device manufacturing method using the...
- Patent number 6,151,121
- Issue date Nov 21, 2000
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and position detecting system using the same
- Patent number 5,943,135
- Issue date Aug 24, 1999
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20230185208
- Publication date Jun 15, 2023
- Canon Kabushiki Kaisha
- SATORU JIMBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...
- Publication number 20220130028
- Publication date Apr 28, 2022
- Canon Kabushiki Kaisha
- Satoru Jimbo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20160033884
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, DETERMINATION METHOD, AND METHOD OF MANUFACT...
- Publication number 20150338751
- Publication date Nov 26, 2015
- Canon Kabushiki Kaisha
- Masahiro Ogura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150235880
- Publication date Aug 20, 2015
- Canon Kabushiki Kaisha
- Hiroshi Inada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150092169
- Publication date Apr 2, 2015
- Canon Kabushiki Kaisha
- Tsutomu Takenaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTUR...
- Publication number 20150062553
- Publication date Mar 5, 2015
- Canon Kabushiki Kaisha
- Takafumi MIYAHARU
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS, ALIGNMENT METHOD, AND METHOD OF MANUFACTURIN...
- Publication number 20150049317
- Publication date Feb 19, 2015
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20140346694
- Publication date Nov 27, 2014
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130221556
- Publication date Aug 29, 2013
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR
- Publication number 20130161868
- Publication date Jun 27, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130100459
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Toshiki Iwai
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20120328725
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20120292801
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD
- Publication number 20110033790
- Publication date Feb 10, 2011
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20100208228
- Publication date Aug 19, 2010
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20090310106
- Publication date Dec 17, 2009
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20090263735
- Publication date Oct 22, 2009
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20090214962
- Publication date Aug 27, 2009
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION SENSOR
- Publication number 20090040489
- Publication date Feb 12, 2009
- Canon Kabushiki Kaisha
- Hiroshi SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION SENSOR
- Publication number 20080094641
- Publication date Apr 24, 2008
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080049203
- Publication date Feb 28, 2008
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection method and apparatus, and exposure method and ap...
- Publication number 20050179898
- Publication date Aug 18, 2005
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detector, position detecting method, and exposure apparatu...
- Publication number 20050117140
- Publication date Jun 2, 2005
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20050002035
- Publication date Jan 6, 2005
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position sensor
- Publication number 20040165195
- Publication date Aug 26, 2004
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection apparatus and method, exposure apparatus, and de...
- Publication number 20030053059
- Publication date Mar 20, 2003
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Position detection apparatus, alignment apparatus and methods there...
- Publication number 20030054574
- Publication date Mar 20, 2003
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection method and apparatus, and exposure method and ap...
- Publication number 20030053057
- Publication date Mar 20, 2003
- Canon Kabushiki Kaisha
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detection apparatus and exposure apparatus using the same
- Publication number 20020097386
- Publication date Jul 25, 2002
- Kazuhiko Mishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

KAZUHIKO MISHIMA

Person

Patents Grantslast 30 patents

Imprint lithography apparatus and device manufacturing method therefor

Imprint apparatus, imprint method, and device manufacturing method

Lithography apparatus, determination method, and method of manufact...

Detection apparatus, imprint apparatus, and method of manufacturing...

Detection apparatus, lithography apparatus and method of manufactur...

Exposure apparatus, exposure method, and device manufacturing method

Position detection apparatus, imprint apparatus, and position detec...

Lithography apparatus, alignment method, and method of manufacturin...

Imprint apparatus, imprint method, and device manufacturing method

Detector, imprint apparatus, and article manufacturing method

Position detection apparatus, imprint apparatus, and position detec...

Detection apparatus, exposure apparatus, and device fabrication method

Exposure apparatus

Position sensor

Position sensor

Position sensor

Position detection method and apparatus, and exposure method and ap...

Position detector, position detecting method, and exposure apparatu...

Position detection method and apparatus, and exposure method and ap...

Position detection apparatus and method, exposure apparatus, and de...

Position detection apparatus, alignment apparatus and methods there...

Detection apparatus and exposure apparatus using the same

Scan type projection exposure apparatus and device manufacturing me...

Position detecting system and device manufacturing method using the...

Position detecting method and position detecting system using the same

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, DETERMINATION METHOD, AND METHOD OF MANUFACT...

DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

DETECTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTUR...

LITHOGRAPHY APPARATUS, ALIGNMENT METHOD, AND METHOD OF MANUFACTURIN...

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR

DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

DETECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS

EXPOSURE APPARATUS

POSITION SENSOR

POSITION SENSOR

EXPOSURE APPARATUS

Position detection method and apparatus, and exposure method and ap...

Position detector, position detecting method, and exposure apparatu...

Exposure apparatus

Position sensor

Position detection apparatus and method, exposure apparatus, and de...

Position detection apparatus, alignment apparatus and methods there...

Position detection method and apparatus, and exposure method and ap...

Detection apparatus and exposure apparatus using the same