Kazuhiko Nagata

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Spin-coating device
- Patent number 5,766,354
- Issue date Jun 16, 1998
- Pioneer Electronic Corporation
- Kazunori Ohmori
- G11 - INFORMATION STORAGE
Information Patent Grant
Flow processing system
- Patent number 5,002,455
- Issue date Mar 26, 1991
- Pioneer Electronic Corporation
- Kazumi Kuriyama
- B08 - CLEANING
Information Patent Grant
Apparatus for detecting faults on the surface of a resist master di...
- Patent number 4,865,445
- Issue date Sep 12, 1989
- Pioneer Electronic Corporation
- Kazumi Kuriyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Flow processing system
- Patent number 4,850,791
- Issue date Jul 25, 1989
- Pioneer Electronic Corporation
- Kazumi Kuriyama
- B08 - CLEANING