Kazuhiko Saito

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus
- Patent number 6,521,105
- Issue date Feb 18, 2003
- Ulvac, Inc.
- Noriaki Tani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Sputtering apparatus
- Publication number 20020043457
- Publication date Apr 18, 2002
- Noriaki Tani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...