Kazuhiko Tonari

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma doping method and manufacturing method of semiconductor device
- Patent number 8,440,551
- Issue date May 14, 2013
- ULVAC, Inc.
- Kazuhiko Tonari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma doping method and manufacturing method of semiconductor device
- Patent number 8,383,496
- Issue date Feb 26, 2013
- Kazuhiko Tonari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implanting method
- Patent number 7,642,530
- Issue date Jan 5, 2010
- Kabushiki Kaisha Toshiba
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implanting method
- Patent number 7,227,159
- Issue date Jun 5, 2007
- Kabushiki Kaisha Toshiba
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Insulated Gate Bipolar Transistor and Production Method Thereof
- Publication number 20160300938
- Publication date Oct 13, 2016
- Ulvac, Inc.
- Kazuhiko Tonari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20120220096
- Publication date Aug 30, 2012
- Kazuhiko Tonari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110129977
- Publication date Jun 2, 2011
- Kazuhiko Tonari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus and ion implanting method
- Publication number 20070152173
- Publication date Jul 5, 2007
- Kabushiki Kaisha Toshiba, ULVAC, Inc.
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus and method
- Publication number 20050244989
- Publication date Nov 3, 2005
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus and ion implanting method
- Publication number 20050211924
- Publication date Sep 29, 2005
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS