Kazuhiko Ueno

Person

  • Kawasaki, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Etching apparatus

    • Patent number 8,123,901
    • Issue date Feb 28, 2012
    • Renesas Electronics Corporation
    • Atsuro Inada
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Etching apparatus

    • Publication number 20060086462
    • Publication date Apr 27, 2006
    • NEC Electronics Corporation
    • Atsuro Inada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching apparatus and etching method

    • Publication number 20060086461
    • Publication date Apr 27, 2006
    • NEC Electronics Corporation
    • Atsuro Inada
    • H01 - BASIC ELECTRIC ELEMENTS