Kazuhiko Urano

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Patents Grantslast 30 patents

Information Patent Grant
Ceramic electrostatic chuck with built-in heater
- Patent number 5,566,043
- Issue date Oct 15, 1996
- Shin-Etsu Chemical Co., Ltd.
- Nobuo Kawada
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Silicon oxide depositing source and coated film
- Patent number 5,532,063
- Issue date Jul 2, 1996
- Shin-Etsu Chemical Co., Ltd.
- Toshihiko Shindoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...