Kazuhiro CHIBA

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Sagamihara-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device
- Patent number 10,607,908
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Kazuhiro Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking device for multi-beam of charged particle writing apparatu...
- Patent number 9,805,905
- Issue date Oct 31, 2017
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking aperture array device for multi-beams, and fabrication met...
- Patent number 9,530,610
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Kazuhiro Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking aperture array and charged particle beam writing apparatus
- Patent number 9,530,616
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...
- Publication number 20240013999
- Publication date Jan 11, 2024
- NuFlare Technology, Inc.
- Toshiki KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20180374768
- Publication date Dec 27, 2018
- NuFlare Technology, Inc.
- Kazuhiro CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...
- Publication number 20160155600
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Kazuhiro CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20160099129
- Publication date Apr 7, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...
- Publication number 20160064179
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS