Kazuhiro Isa

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Amagasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 8,882,962
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Jun Yamashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning treatment chamber in substrate treating apparat...
- Patent number 7,887,637
- Issue date Feb 15, 2011
- Tokyo Electron Limited
- Shigenori Ozaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR SELECTIVE OXIDATION, DEVICE FOR SELECTIVE OXIDATION, AND...
- Publication number 20120094505
- Publication date Apr 19, 2012
- TOKYO ELECTRON LIMITED
- Hideo Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110174441
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Jun YAMASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE M...
- Publication number 20100029093
- Publication date Feb 4, 2010
- TOKYO ELECTRON LIMITED
- Toshihiko Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for cleaning treatment chamber iIn substrate treating appara...
- Publication number 20070163617
- Publication date Jul 19, 2007
- Tokyo Electron Limited
- Shigenori Ozaki
- B08 - CLEANING