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Kazuhiro Kanaya
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
9,299,540
Issue date
Mar 29, 2016
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
8,864,934
Issue date
Oct 21, 2014
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for processing a substrate and program therefor
Patent number
7,409,253
Issue date
Aug 5, 2008
Tokyo Electron Limited
Noriaki Shimizu
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20150001181
Publication date
Jan 1, 2015
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20120248067
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for processing a substrate and program therefor
Publication number
20060149403
Publication date
Jul 6, 2006
TOKYO ELECTRON LIMITED
Noriaki Shimizu
G05 - CONTROLLING REGULATING