Kazuhiro Kimura

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heating part, substrate processing apparatus, and method of manufac...
- Patent number 11,198,935
- Issue date Dec 14, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS