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Kazuhiro Kubota
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Nirasaki-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,886,097
Issue date
Jan 5, 2021
Tokyo Electron Limited
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
9,887,109
Issue date
Feb 6, 2018
Tokyo Electron Limited
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
9,881,806
Issue date
Jan 30, 2018
Tokyo Electron Limited
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
9,460,893
Issue date
Oct 4, 2016
Tokyo Electron Limited
Masaya Kawamata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method and etching apparatus
Patent number
9,396,968
Issue date
Jul 19, 2016
Tokyo Electron Limited
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
9,390,935
Issue date
Jul 12, 2016
Tokyo Electron Limited
Maju Tomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
9,349,619
Issue date
May 24, 2016
Tokyo Electron Limited
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and semiconductor device manufacturing method
Patent number
9,330,930
Issue date
May 3, 2016
Tokyo Electron Limited
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
9,318,340
Issue date
Apr 19, 2016
Tokyo Electron Limited
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a pattern and substrate processing system
Patent number
9,279,184
Issue date
Mar 8, 2016
Tokyo Electron Limited
Kazuhiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of etching silicon oxide film
Patent number
9,257,301
Issue date
Feb 9, 2016
Tokyo Electron Limited
Masahiro Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and semiconductor device manufacturing method
Patent number
9,048,178
Issue date
Jun 2, 2015
Tokyo Electron Limited
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,790,489
Issue date
Jul 29, 2014
Tokyo Electron Limited
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing system, and compu...
Patent number
8,187,981
Issue date
May 29, 2012
Tokyo Electron Limited
Kazuhiro Tomioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for manufacturing a semiconductor device
Patent number
8,075,730
Issue date
Dec 13, 2011
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method for recovering a damaged low-k film of a substrat...
Patent number
8,048,687
Issue date
Nov 1, 2011
Tokyo Electron Limited
Wataru Shimizu
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for detecting an end point of resist peeling, method and app...
Patent number
8,021,564
Issue date
Sep 20, 2011
Tokyo Electron Limited
Isamu Sakuragi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Magnetic field generator for magnetron plasma, and plasma etching a...
Patent number
7,922,865
Issue date
Apr 12, 2011
Shin-Etsu Chemical Co., Ltd.
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and storage medium
Patent number
7,799,703
Issue date
Sep 21, 2010
Tokyo Electron Limited
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of repairing damaged film having low dielectric constant, se...
Patent number
7,556,970
Issue date
Jul 7, 2009
Tokyo Electron Limited
Masaru Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
7,393,460
Issue date
Jul 1, 2008
Tokyo Electron Limited
Masaru Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron plasma processing apparatus
Patent number
6,190,495
Issue date
Feb 20, 2001
Tokyo Electron Limited
Kazuhiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160372299
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Kazuhiro KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20160196981
Publication date
Jul 7, 2016
TOKYO ELECTRON LIMITED
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20160099161
Publication date
Apr 7, 2016
TOKYO ELECTRON LIMITED
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20160013065
Publication date
Jan 14, 2016
TOKYO ELECTRON LIMITED
Kazuhiro KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150187588
Publication date
Jul 2, 2015
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A PATTERN AND SUBSTRATE PROCESSING SYSTEM
Publication number
20150167163
Publication date
Jun 18, 2015
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD
Publication number
20150170932
Publication date
Jun 18, 2015
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20150140821
Publication date
May 21, 2015
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING SILICON OXIDE FILM
Publication number
20150056808
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Masahiro OGASAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20140273486
Publication date
Sep 18, 2014
TOKYO ELECTRON LIMITED
Takayuki Katsunuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20140234992
Publication date
Aug 21, 2014
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20140193977
Publication date
Jul 10, 2014
TOKYO ELECTRON LIMITED
Masaya Kawamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130014895
Publication date
Jan 17, 2013
TOKYO ELECTRON LIMITED
Masaya Kawamata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20120238040
Publication date
Sep 20, 2012
TOKYO ELECTRON LIMITED
Kazuhiro KUBOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20120034779
Publication date
Feb 9, 2012
Satoru SHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20120000886
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Masanobu HONDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
Publication number
20100304505
Publication date
Dec 2, 2010
TOKYO ELECTRON LIMITED
Wataru Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND STORAGE MEDIUM
Publication number
20100029086
Publication date
Feb 4, 2010
TOKYO ELECTON LIMITED
Hidenori Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
Publication number
20090014414
Publication date
Jan 15, 2009
TOKYO ELECTRON LIMITED
Kazuhiro Tomioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
Publication number
20090001046
Publication date
Jan 1, 2009
TOKYO ELECTRON LIMITED
Kazuhiro KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
Publication number
20080194115
Publication date
Aug 14, 2008
TOKYO ELECTON LIMITED
Kazuhiro KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETECTING AN END POINT OF RESIST PEELING, METHOD AND APP...
Publication number
20080083500
Publication date
Apr 10, 2008
TOKYO ELECTRON LIMITED
Isamu SAKURAGI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process For Fabricating Semiconductor Device
Publication number
20080057728
Publication date
Mar 6, 2008
TOKYO ELECTRON LIMITED
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20080045025
Publication date
Feb 21, 2008
TOKYO ELECTRON LIMITED
Ryuichi ASAKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of repairing damaged film having low dielectric constant, se...
Publication number
20070232076
Publication date
Oct 4, 2007
Masaru Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method and plasma processing apparatus
Publication number
20060223317
Publication date
Oct 5, 2006
TOKYO ELECTRON LIMITED
Masaru Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma ashing method
Publication number
20050106875
Publication date
May 19, 2005
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetic field generator for magnetron plasma, and plasma etching a...
Publication number
20040094509
Publication date
May 20, 2004
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS