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Heater
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Patent number 11,116,046
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Issue date Sep 7, 2021
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Kyocera Corporation
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Kazuhiro Kuchimachi
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H01 - BASIC ELECTRIC ELEMENTS
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Thermoelectric module
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Patent number 7,956,277
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Issue date Jun 7, 2011
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Kyocera Corporation
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Kazuhiro Kuchimachi
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H01 - BASIC ELECTRIC ELEMENTS
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Electrostatic chuck
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Patent number 7,312,974
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Issue date Dec 25, 2007
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Kyocera Corporation
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Kazuhiro Kuchimachi
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Wafer holding member
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Patent number 6,133,557
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Issue date Oct 17, 2000
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Kyocera Corporation
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Yasunori Kawanabe
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer support member
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Patent number 5,886,863
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Issue date Mar 23, 1999
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Kyocera Corporation
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Koichi Nagasaki
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Wafer holding member
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Patent number 5,677,253
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Issue date Oct 14, 1997
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Kyocera Corporation
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Hironori Inoue
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C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
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Electrostatic chuck
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Patent number 5,413,360
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Issue date May 9, 1995
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Kyocera Corporation
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Hitoshi Atari
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR