Kazuhiro Morimitsu

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 10,978,361
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Takafumi Sasaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,714,316
- Issue date Jul 14, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,424,520
- Issue date Sep 24, 2019
- Kokusai Electric Corporation
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
- Patent number 9,502,236
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,487,863
- Issue date Nov 8, 2016
- Hitachi Kokusai Electric Inc.
- Shun Matsui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube, substrate processing apparatus, and method of manufa...
- Patent number 9,412,582
- Issue date Aug 9, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,163,309
- Issue date Oct 20, 2015
- Hitachi Kokusai Electric, Inc.
- Tetsuo Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including shielding unit for suppres...
- Patent number 9,084,298
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment apparatus
- Patent number 9,074,284
- Issue date Jul 7, 2015
- Hitachi Kokusai Electric, Inc.
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,070,554
- Issue date Jun 30, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
- Patent number 9,064,695
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate holder, and manufacturing...
- Patent number 7,455,734
- Issue date Nov 25, 2008
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device producing apparatus and producing method of se...
- Patent number 7,198,447
- Issue date Apr 3, 2007
- Hitachi Kokusai Electric Inc.
- Kazuhiro Morimitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and method for processing substrates
- Patent number 6,737,613
- Issue date May 18, 2004
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200098653
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190244790
- Publication date Aug 8, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160230280
- Publication date Aug 11, 2016
- Hitachi Kokusai Electric Inc.
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFA...
- Publication number 20150270125
- Publication date Sep 24, 2015
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RE...
- Publication number 20150194304
- Publication date Jul 9, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Non-Transitory Computer-Readable Re...
- Publication number 20150194306
- Publication date Jul 9, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093916
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuo YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150093913
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110306212
- Publication date Dec 15, 2011
- Hitachi Kokusai Electric Inc.
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus
- Publication number 20110253049
- Publication date Oct 20, 2011
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110210118
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT
- Publication number 20100282166
- Publication date Nov 11, 2010
- Hitachi Kokusai Electric Inc.
- Masanao FUKUDA
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20100275848
- Publication date Nov 4, 2010
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor processing apparatus
- Publication number 20090029561
- Publication date Jan 29, 2009
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate treatment apparatus, substrate holding device, and semico...
- Publication number 20070007646
- Publication date Jan 11, 2007
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and method for processing substrates
- Publication number 20030183614
- Publication date Oct 2, 2003
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate processing apparatus and method for manufacturing a semic...
- Publication number 20020012581
- Publication date Jan 31, 2002
- Hitachi Kokusai Electric Inc.
- Shigeru Odake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kazuhiro Morimitsu

Person

Patents Grantslast 30 patents

Substrate processing apparatus and recording medium

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Substrate processing apparatus, non-transitory computer-readable re...

Substrate processing apparatus

Reaction tube, substrate processing apparatus, and method of manufa...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus including shielding unit for suppres...

Heat treatment apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, non-transitory computer-readable re...

Substrate processing apparatus, substrate holder, and manufacturing...

Semiconductor device producing apparatus and producing method of se...

Heat treatment apparatus and method for processing substrates

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS

REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RE...

Substrate Processing Apparatus, Non-Transitory Computer-Readable Re...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...

Semiconductor processing apparatus

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT

HEAT TREATMENT APPARATUS

Semiconductor processing apparatus

Substrate treatment apparatus, substrate holding device, and semico...

Heat treatment apparatus and method for processing substrates

Substrate processing apparatus and method for manufacturing a semic...