Kazuhiro Nishijima

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 6,878,401
- Issue date Apr 12, 2005
- Tokyo Electron Limited
- Kazuhiro Nishijima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VAPORIZED MATERIAL SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATUS...
- Publication number 20130133703
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Kazuhiro NISHIJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SOLUTION SUPPLY APPARATUS
- Publication number 20090183676
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Hiroyuki FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method
- Publication number 20030059534
- Publication date Mar 27, 2003
- TOKYO ELECTRON LIMITED
- Kazuhiro Nishijima
- H01 - BASIC ELECTRIC ELEMENTS