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Kazuhiro NISHIMURA
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Kyoto-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treating apparatus and substrate transporting method
Patent number
10,181,417
Issue date
Jan 15, 2019
SCREEN Semiconductor Solutions Co., Ltd.
Yoshinori Kokabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
9,494,877
Issue date
Nov 15, 2016
SCREEN Semiconductor Solutions Co., Ltd.
Kazuhiro Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure device, substrate processing apparatus, method for exposin...
Patent number
9,152,054
Issue date
Oct 6, 2015
SCREEN Semiconductor Solutions Co., Ltd.
Kazuhiro Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
7,665,415
Issue date
Feb 23, 2010
Dainippon Screen Mfg. Co., Ltd.
Kazuhiro Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus having regulated power consumption a...
Patent number
6,060,697
Issue date
May 9, 2000
Dainippon Screen Mfg. Co., Ltd.
Akihiko Morita
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate transfer method and interface apparatus
Patent number
5,788,868
Issue date
Aug 4, 1998
Dainippon Screen Mfg. Co., Ltd.
Masayuki Itaba
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170008017
Publication date
Jan 12, 2017
SCREEN Semiconductor Solutions Co., Ltd.
Kazuhiro NISHIMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
Publication number
20150279713
Publication date
Oct 1, 2015
SCREEN Semiconductor Solutions Co., Ltd.
Yoshinori KOKABU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130312658
Publication date
Nov 28, 2013
Masahito KASHIYAMA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSIN...
Publication number
20130258299
Publication date
Oct 3, 2013
Kazuhiro NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20120249990
Publication date
Oct 4, 2012
Kazuhiro NISHIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus
Publication number
20060174832
Publication date
Aug 10, 2006
DAINIPPON SCREEN MFG., CO., LTD.
Kazuhiro Nishimura
H01 - BASIC ELECTRIC ELEMENTS