Kazuhiro Nishina

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Process for chlorine trifluoride chamber cleaning
- Patent number 5,926,743
- Issue date Jul 20, 1999
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for chlorine trifluoride chamber cleaning
- Patent number 5,849,092
- Issue date Dec 15, 1998
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...