Kazuhiro Ohara

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and apparatus using plasma produced by mic...
- Patent number 5,762,814
- Issue date Jun 9, 1998
- Hitachi, Ltd.
- Kazuhiro Ohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for removing foreign particles
- Patent number 5,531,862
- Issue date Jul 2, 1996
- Hitachi, Ltd.
- Toru Otsubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus using plasma produced by microwaves
- Patent number 5,304,277
- Issue date Apr 19, 1994
- Hitachi, Ltd.
- Kazuhiro Ohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma processing
- Patent number 4,985,109
- Issue date Jan 15, 1991
- Hitachi, Ltd.
- Toru Otsubo
- H01 - BASIC ELECTRIC ELEMENTS