Kazuhiro OHKUBO

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Patents Grantslast 30 patents

Information Patent Grant
Film thickness measurement method, epitaxial wafer production proce...
- Patent number 8,409,349
- Issue date Apr 2, 2013
- Sumco Corporation
- Kazuhiro Ohkubo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER CLEANING DEVICE, SEMICONDUCTOR WAFER CLEANING M...
- Publication number 20240258126
- Publication date Aug 1, 2024
- SUMCO CORPORATION
- Kaito NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR SEMICONDUCTOR WAFER AND METHOD OF CLEANING S...
- Publication number 20230033913
- Publication date Feb 2, 2023
- SUMCO CORPORATION
- Kaito NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM THICKNESS MEASUREMENT METHOD, EPITAXIAL WAFER PRODUCTION PROCE...
- Publication number 20090305021
- Publication date Dec 10, 2009
- SUMCO CORPORATION
- Kazuhiro OHKUBO
- G01 - MEASURING TESTING