Kazuhiro Ooya

Follow

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 9,202,731
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing apparatus
- Patent number 8,897,631
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Temperature Regulating Device and Substrate Processing Ap...
- Publication number 20150075748
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tomohiro SUZUKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
HEATING APPARATUS AND ANNEALING APPARATUS
- Publication number 20120325795
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Tomohiro SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20120328273
- Publication date Dec 27, 2012
- Hisashi KAWANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus, Liquid Processing Method, and Recordin...
- Publication number 20120160274
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS
- Publication number 20110174790
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Tomohiro Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS
- Publication number 20110033175
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS