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Kazuhiro Ozawa
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Nirasaki-shi, JP
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last 30 patents
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Patent Grant
Probe apparatus and probing method
Patent number
7,724,007
Issue date
May 25, 2010
Tokyo Electron Limited
Yasuhito Yamamoto
G01 - MEASURING TESTING
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Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
Patent number
7,701,236
Issue date
Apr 20, 2010
Tokyo Electron Limited
Shuji Akiyama
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PROBE APPARATUS AND PROBING METHOD
Publication number
20090085594
Publication date
Apr 2, 2009
TOKYO ELECTRON LIMITED
Yasuhito Yamamoto
G01 - MEASURING TESTING
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Patent Application
PROBE APPARATUS
Publication number
20080290886
Publication date
Nov 27, 2008
TOKYO ELECTRON LIMITED
Shuji Akiyama
G01 - MEASURING TESTING