Kazuhiro Segawa

Person

Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Light-exposure method, light-exposure control unit, and semiconduct...
- Patent number 11,016,391
- Issue date May 25, 2021
- TOSHIBA MEMORY CORPORATION
- Kazuhiro Segawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacturing system for semiconductor device, method of manufactur...
- Patent number 10,269,661
- Issue date Apr 23, 2019
- TOSHIBA MEMORY CORPORATION
- Kazuhiro Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method, manufacturing method of device, and thin film sheet
- Patent number 10,054,856
- Issue date Aug 21, 2018
- TOSHIBA MEMORY CORPORATION
- Kentaro Matsunaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint device and pattern forming method
- Patent number 9,952,505
- Issue date Apr 24, 2018
- TOSHIBA MEMORY CORPORATION
- Yosuke Okamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern accuracy detecting apparatus and processing system
- Patent number 9,941,177
- Issue date Apr 10, 2018
- TOSHIBA MEMORY CORPORATION
- Kentaro Kasa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Misalignment checking device and manufacturing method of semiconduc...
- Patent number 9,929,103
- Issue date Mar 27, 2018
- TOSHIBA MEMORY CORPORATION
- Kazuhiro Segawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method and manufacturing method of sem...
- Patent number 9,625,831
- Issue date Apr 18, 2017
- Kabushiki Kaisha Toshiba
- Kazuhiro Segawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle mark arrangement method and nontransitory computer readable...
- Patent number 9,396,299
- Issue date Jul 19, 2016
- Kabushiki Kaisha Toshiba
- Shinichi Nakagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus and transfer characteristics measuring method
- Patent number 9,239,526
- Issue date Jan 19, 2016
- Kabushiki Kaisha Toshiba
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT-EXPOSURE METHOD, LIGHT-EXPOSURE CONTROL UNIT, AND SEMICONDUCT...
- Publication number 20200073256
- Publication date Mar 5, 2020
- Toshiba Memory Corporation
- Kazuhiro Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING SYSTEM FOR SEMICONDUCTOR DEVICE, METHOD OF MANUFACTUR...
- Publication number 20180277451
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Kazuhiro SEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN ACCURACY DETECTING APPARATUS AND PROCESSING SYSTEM
- Publication number 20170271214
- Publication date Sep 21, 2017
- Kabushiki Kaisha Toshiba
- Kentaro KASA
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE METHOD, MANUFACTURING METHOD OF DEVICE, AND THIN FILM SHEET
- Publication number 20160240423
- Publication date Aug 18, 2016
- KABUSHIKI KAISHA TOSHIBA
- Kentaro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MISALIGNMENT CHECKING DEVICE AND MANUFACTURING METHOD OF SEMICONDUC...
- Publication number 20160223321
- Publication date Aug 4, 2016
- KABUSHIKI KAISHA TOSHIBA
- Kazuhiro SEGAWA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20160020099
- Publication date Jan 21, 2016
- KABUSHIKI KAISHA TOSHIBA
- Kazuhiro SEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE MARK ARRANGEMENT METHOD AND NONTRANSITORY COMPUTER READABLE...
- Publication number 20150339423
- Publication date Nov 26, 2015
- KABUSHIKI KAISHA TOSHIBA
- Shinichi Nakagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT DEVICE AND PATTERN FORMING METHOD
- Publication number 20150251350
- Publication date Sep 10, 2015
- KABUSHIKI KAISHA TOSHIBA
- Yosuke OKAMOTO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS AND TRANSFER CHARACTERISTICS MEASURING METHOD
- Publication number 20150022791
- Publication date Jan 22, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kazuhiro Segawa

Person

Patents Grantslast 30 patents

Light-exposure method, light-exposure control unit, and semiconduct...

Manufacturing system for semiconductor device, method of manufactur...

Exposure method, manufacturing method of device, and thin film sheet

Imprint device and pattern forming method

Pattern accuracy detecting apparatus and processing system

Misalignment checking device and manufacturing method of semiconduc...

Exposure apparatus, exposure method and manufacturing method of sem...

Reticle mark arrangement method and nontransitory computer readable...

Exposure apparatus and transfer characteristics measuring method

Patents Applicationslast 30 patents

LIGHT-EXPOSURE METHOD, LIGHT-EXPOSURE CONTROL UNIT, AND SEMICONDUCT...

MANUFACTURING SYSTEM FOR SEMICONDUCTOR DEVICE, METHOD OF MANUFACTUR...

PATTERN ACCURACY DETECTING APPARATUS AND PROCESSING SYSTEM

EXPOSURE METHOD, MANUFACTURING METHOD OF DEVICE, AND THIN FILM SHEET

MISALIGNMENT CHECKING DEVICE AND MANUFACTURING METHOD OF SEMICONDUC...

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

RETICLE MARK ARRANGEMENT METHOD AND NONTRANSITORY COMPUTER READABLE...

IMPRINT DEVICE AND PATTERN FORMING METHOD

EXPOSURE APPARATUS AND TRANSFER CHARACTERISTICS MEASURING METHOD