Kazuhiro Shimeno

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor fabricating apparatus, method for modifying positiona...
- Patent number 6,318,944
- Issue date Nov 20, 2001
- Kokusai Electric Co., Ltd.
- Kazuhiro Shimeno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment of semiconductor wafers where upper heater directly...
- Patent number 5,960,159
- Issue date Sep 28, 1999
- Kokusai Electric Co., Ltd.
- Fumihide Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer plate
- Patent number 5,669,644
- Issue date Sep 23, 1997
- Kokusai Electric Co., Ltd.
- Hideki Kaihotsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Placement Stage, Substrate Processing Apparatus and Metho...
- Publication number 20120329290
- Publication date Dec 27, 2012
- Hitachi Kokusai Electric Inc.
- Toshiya Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060075972
- Publication date Apr 13, 2006
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040026036
- Publication date Feb 12, 2004
- Hitachi Kokusai Electric Inc.
- Kazuhiro Shimeno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020017363
- Publication date Feb 14, 2002
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010050146
- Publication date Dec 13, 2001
- HITACHI KOKUSAI ELECTRIC INC. HITACHI LTD.
- Kazuhiro Shimeno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...