TREA

Kazuhiro Tahara

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,544,380
    • Issue date Apr 8, 2003
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,391,147
    • Issue date May 21, 2002
    • Tokyo Electron Limited
    • Kosuke Imafuku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,264,788
    • Issue date Jul 24, 2001
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method utilizing an amplitude-modulated high frequ...
    • Patent number 6,106,737
    • Issue date Aug 22, 2000
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,074,518
    • Issue date Jun 13, 2000
    • Tokyo Electron Limited
    • Kosuke Imafuku
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma treatment apparatus and method
    • Patent number 5,698,062
    • Issue date Dec 16, 1997
    • Tokyo Electron Limited
    • Takao Sakamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma treatment method and apparatus
    • Publication number 20020088547
    • Publication date Jul 11, 2002
    • TOKYO ELECTRON LIMITED
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma treatment method and apparatus
    • Publication number 20010013504
    • Publication date Aug 16, 2001
    • TOKYO ELECTRON LIMITED
    • Kosuke Imafuku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...