Kazuhiro Teraoka

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,236,192
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 9,627,192
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Naoyuki Okamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20160027635
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Naoyuki Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20150147888
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20140377463
- Publication date Dec 25, 2014
- Yosuke Hachiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...