Kazuhiro Ueda

Follow

Person

Kawagoe, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement method of layer thickness for thin film stacks
- Patent number 7,751,527
- Issue date Jul 6, 2010
- Hitachi, Ltd.
- Kazuhiro Ueda
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method for thin film stack
- Patent number 7,724,872
- Issue date May 25, 2010
- Hitachi, Ltd.
- Kazuhiro Ueda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASURING APPARATUS
- Publication number 20130279652
- Publication date Oct 24, 2013
- Hitachi, Ltd
- Akira NAMBU
- G01 - MEASURING TESTING
Information Patent Application
Measurement method of layer thickness for thin film stacks
- Publication number 20090180588
- Publication date Jul 16, 2009
- Kazuhiro Ueda
- G01 - MEASURING TESTING
Information Patent Application
Inspection method for thin film stack
- Publication number 20080219409
- Publication date Sep 11, 2008
- Hitachi, Ltd.
- Kazuhiro Ueda
- G01 - MEASURING TESTING