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Kazuhiro Yonekura
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Isehara-city, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate support device
Patent number
10,276,410
Issue date
Apr 30, 2019
NHK Spring Co., Ltd.
Toshihiro Tachikawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE SUPPORT DEVICE
Publication number
20130134148
Publication date
May 30, 2013
NHK Spring Co., Ltd.
Toshihiro TACHIKAWA
H01 - BASIC ELECTRIC ELEMENTS