Kazuhisa HASUMI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern shape evaluation device, pattern shape evaluation system, a...
- Patent number 11,713,963
- Issue date Aug 1, 2023
- HITACHI HIGH-TECH CORPORATION
- Atsuko Shintani
- G01 - MEASURING TESTING
Information Patent Grant
Image processing device, image processing method and charged partic...
- Patent number 11,430,106
- Issue date Aug 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Takeyoshi Ohashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern evaluation device
- Patent number 10,854,420
- Issue date Dec 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Miki Isawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image analysis apparatus and charged particle beam apparatus
- Patent number 10,724,856
- Issue date Jul 28, 2020
- HITACHI HIGH-TECH CORPORATION
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection device
- Patent number 10,672,119
- Issue date Jun 2, 2020
- HITACHI HIGH-TECH CORPORATION
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measurement method and measurement apparatus
- Patent number 10,295,339
- Issue date May 21, 2019
- Hitachi High-Technologies Corporation
- Kazuhisa Hasumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for pattern measurement, method for setting device parameter...
- Patent number 9,831,062
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,670,115
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Yuji Miyoshi
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor defect classifying method, semiconductor defect class...
- Patent number 8,595,666
- Issue date Nov 26, 2013
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN SHAPE EVALUATION DEVICE, PATTERN SHAPE EVALUATION SYSTEM, A...
- Publication number 20220034653
- Publication date Feb 3, 2022
- Hitachi High-Tech Corporation
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE PROCESSING DEVICE, IMAGE PROCESSING METHOD AND CHARGED PARTIC...
- Publication number 20200219243
- Publication date Jul 9, 2020
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN EVALUATION DEVICE
- Publication number 20200098543
- Publication date Mar 26, 2020
- Miki ISAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ANALYSIS APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190204247
- Publication date Jul 4, 2019
- Hitachi High-Technologies Corporation
- Atsuko YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20180308228
- Publication date Oct 25, 2018
- Hitachi High-Technologies Corporation
- Atsuko YAMAGUCHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Measurement Method and Measurement Apparatus
- Publication number 20170030712
- Publication date Feb 2, 2017
- Hitachi High-Technologies Corporation
- Kazuhisa HASUMI
- G01 - MEASURING TESTING
Information Patent Application
Method for Pattern Measurement, Method for Setting Device Parameter...
- Publication number 20150357158
- Publication date Dec 10, 2015
- Hitachi High-Technologies Corporation
- Makoto SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTI...
- Publication number 20140177940
- Publication date Jun 26, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEFECT CLASSIFYING METHOD, SEMICONDUCTOR DEFECT CLASS...
- Publication number 20120131529
- Publication date May 24, 2012
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20110255080
- Publication date Oct 20, 2011
- Hitachi High-Technologies Corporation
- Yuji Miyoshi
- G01 - MEASURING TESTING

Kazuhisa HASUMI

Person

Patents Grantslast 30 patents

Pattern shape evaluation device, pattern shape evaluation system, a...

Image processing device, image processing method and charged partic...

Pattern evaluation device

Image analysis apparatus and charged particle beam apparatus

Inspection device

Pattern measurement method and measurement apparatus

Method for pattern measurement, method for setting device parameter...

Inspection method and inspection apparatus

Semiconductor defect classifying method, semiconductor defect class...

Patents Applicationslast 30 patents

PATTERN SHAPE EVALUATION DEVICE, PATTERN SHAPE EVALUATION SYSTEM, A...

IMAGE PROCESSING DEVICE, IMAGE PROCESSING METHOD AND CHARGED PARTIC...

PATTERN EVALUATION DEVICE

IMAGE ANALYSIS APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

INSPECTION DEVICE

Pattern Measurement Method and Measurement Apparatus

Method for Pattern Measurement, Method for Setting Device Parameter...

RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTI...

SEMICONDUCTOR DEFECT CLASSIFYING METHOD, SEMICONDUCTOR DEFECT CLASS...

INSPECTION METHOD AND INSPECTION APPARATUS